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In-situ observations of ion implanted surfaces

Conference ·
OSTI ID:4034190
A scanning electron microscope facility is described which enables direct observations of sample surfaces during implantation. This technique enables measurements of the growth rates of surface features caused by He implantation of metals. Results from 300 keV He$sup +$ implantation of Ti samples indicate that exfoliation or flaking of the sample surface is a distinctly different process from blistering and proceeds at radically different rates. In addition, it was observed that exfoliation could be significantly reduced by cold-working.
Research Organization:
Sandia Labs., Livermore, Calif. (USA)
DOE Contract Number:
AT(29-1)-789
NSA Number:
NSA-33-030260
OSTI ID:
4034190
Report Number(s):
SAND--76-8618; CONF-760209--22
Country of Publication:
United States
Language:
English