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Energy dependence of scattered ion yields in ISS

Journal Article · · Journal of Vacuum Science and Technology
DOI:https://doi.org/10.1116/1.568892· OSTI ID:4022365

Scattered ion yields as a function of primary ion energy in the range from 200 to 2500 eV have been measured for He⁺, Ne⁺, and Ar⁺ scattering from a variety of solid surfaces. The energy dependence of these yield curves contains information about the electronic states of surface atoms which complements normal ISS data. In addition, changes in the surface-atom chemical environment can be manifested as changes in the yield curve. A preliminary classification of yield curve shapes is proposed based on two considerations. First, does the target atom have an electronic state with a binding energy within approximately +-10 eV of the bombarding species' first ionization potential Second, if the first criterion is satisfied, what are the orbital symmetries of this electronic state and the vacant ionic state (AIP)

Research Organization:
Central Research Laboratories, 3M Company, St. Paul, Minnesota 55133
Sponsoring Organization:
USDOE
NSA Number:
NSA-33-031019
OSTI ID:
4022365
Journal Information:
Journal of Vacuum Science and Technology, Journal Name: Journal of Vacuum Science and Technology Journal Issue: 1 Vol. 13; ISSN JVSTAL; ISSN 0022-5355
Country of Publication:
United States
Language:
English