Surface potential measurements on GaN and AlGaN/GaN heterostructures by scanning Kelvin probe microscopy

Journal Article · Sun Jul 01 04:00:00 EDT 2001 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.1371941· OSTI ID:40204374

Koley, G; Spencer, M G

Surface potentials on GaN epilayers and Al{sub 0.35}Ga{sub 0.65}N/GaN heterostructures have been studied by scanning Kelvin probe microscopy (SKPM) in conjunction with noncontact atomic force microscopy. The dependence of the surface potential on doping in GaN films, as well as the variation of surface potential with Al{sub 0.35}Ga{sub 0.65}N barrier layer thickness has been investigated. The bare surface barrier height (BSBH), as measured by SKPM, is observed to decrease from {similar_to}1. 40{+-}0.1 eV to {similar_to}0.60{+-}0.1 eV with increasing doping in the GaN epilayers. Schottky barrier height calculated from the measurements of BSBH on n-GaN agrees very well with results from previous studies. We have also estimated the surface state density for GaN based on the measured values of BSBH. The semiconductor {open_quotes}work function{close_quotes} at the Al{sub 0.35}Ga{sub 0.65}N surface (in heterostructure samples) is observed to decrease by {similar_to}0.60 eV with increase in barrier layer thickness from {similar_to}50 to {similar_to}440 Aa. A simple model considering the presence of a uniform density of charged acceptors in the Al{sub 0.35}Ga{sub 0.65}N layer is proposed to explain the observed decreasing trend in work function. {copyright} 2001 American Institute of Physics.

• Sponsoring Organization: (US)
• OSTI ID: 40204374
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 1 Vol. 90; ISSN 0021-8979
• Publisher: The American Physical Society
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ATOMIC FORCE MICROSCOPY
DATA
MICROSCOPY
PHYSICS
PROBES
SURFACE POTENTIAL
THICKNESS
WORK FUNCTIONS