Commercial RTP -- A SEMATECH perspective
- IBM, Burlington, VT (United States)
- AMD, Austin, TX (United States)
- AT and T, Orlando, FL (United States)
- Motorola, Austin, TX (United States)
- SEMATECH, Austin, TX (United States)
This paper discusses various commercial aspects of Rapid Thermal Processing (RTP). It provides an overview of SEMATECH`s efforts to improve the manufacturing viability of RTP. Over the past several years SEMATECH, a US Government/Industry consortium, has identified thermal equipment and processing needs relating to semiconductor manufacturing. It has aggressively pursued solutions to these needs through specific equipment projects. These projects include: RTP Installed Base Productivity Improvement, 0.25um RTP Tool Development, and RTP Modeling and Component Technology. Also discussed are several thermal projects which focus on the performance of more traditional tools. A comparison between RTP and a vertical furnace with model based process control and a small batch fast ramp furnace is made. A brief discussion of an RTP gate stack cluster tool project is followed by a review of future thermal processing needs, including 300mm.
- OSTI ID:
- 400676
- Report Number(s):
- CONF-960401--; ISBN 1-55899-332-0
- Country of Publication:
- United States
- Language:
- English
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