Deposition of diamond-like carbon films by laser ablation
- Department of Electrical and Electronic Engineering, Toyohashi University of Technology Tenpaku, Toyohashi 441 (Japan)
Diamond-like carbon (DLC) films were deposited by laser ablation, using an ArF laser and a KrF laser. The target of laser ablation was frozen acetylene, instead of a conventional graphite. The DLC films were produced by the ArF laser between room temperature and 300{degree}C. The C-H bond was missing from the films produced by the ArF laser, while it was present for the films produced by the KrF laser. It was possible to deposit particle-free films in contrast to laser ablation of the graphite target. Experimental results suggested the importance of energetic charged species ejected from frozen acetylene. {copyright} {ital 1996 American Institute of Physics.}
- OSTI ID:
- 397370
- Report Number(s):
- CONF-950476--
- Journal Information:
- AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 369; ISSN 0094-243X; ISSN APCPCS
- Country of Publication:
- United States
- Language:
- English
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