Cross sections for the electron-impact ionization of SiHx (x=1-3) radicals
Absolute partial cross sections for the ionization and dissociative ionization of the SiH{sub x} (x=1-3) free radicals have been measured using the fast-neutral-beam technique. SiH{sub 4} is a prominent constituent in many technological processing plasmas and a minor constituent in some planetary atmospheres. In both environments, the break-up of SiH{sub 4} and the subsequent ionization and dissociative ionization of the SiH{sub x} radicals play an important role of modelling and diagnostics purposes. As was done for the CD{sub x} radicals, the authors used the deuterated target species SiD{sub x} for better mass separation of the various fragment ions in their apparatus (ionization cross sections are essentially insensitive to isotope effects). Maximum cross sections exceeding 3 x 10{sup {minus}20} m{sup 2} were found for several dissociation channels. A complete discussion of all measured cross section will be presented at the Conference.
- OSTI ID:
- 394317
- Report Number(s):
- CONF-9605105--
- Journal Information:
- Bulletin of the American Physical Society, Journal Name: Bulletin of the American Physical Society Journal Issue: 3 Vol. 41; ISSN BAPSA6; ISSN 0003-0503
- Country of Publication:
- United States
- Language:
- English
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