Electron-impact ionization cross sections of the SiF/sub 3/ free radical

Journal Article · Sat Oct 01 04:00:00 EDT 1988 · J. Chem. Phys.; (United States)

OSTI ID:6952595

Hayes, T R; Shul, R J; Baiocchi, F A; Wetzel, R C; Freund, R S

Absolute cross sections for electron-impact ionization of the SiF/sub 3/ free radical from threshold to 200 eV are presented for formation of the parent SiF/sup +//sub 3/ ion and the fragment SiF/sup +//sub 2/, SiF/sup +/, and Si/sup +/ ions. A 3 keV beam of SiF/sub 3/ is prepared by near-resonant charge transfer of SiF/sup +//sub 3/ with 1,3,5-trimethylbenzene. The beam contains only ground electronic state neutral radicals, but with as much as 1.5 eV of vibrational energy. The absolute cross section for formation of the parent ion at 70 eV is 0.67 +- 0.09 A/sup 2/. At 70 eV the formation of SiF/sup +//sub 2/ is the major process, having a cross section 2.51 +- 0.02 times larger than that of the parent ion, while the SiF/sup +/ fragment has a cross section 1.47 +- 0.08 times larger than the parent. Threshold measurements show that ion pair dissociation processes make a significant contribution to the formation of positively charged fragment ions.

• Research Organization: ATandT Bell Laboratories, Murray Hill, New Jersey 07974
• OSTI ID: 6952595
• Journal Information: J. Chem. Phys.; (United States), Journal Name: J. Chem. Phys.; (United States) Vol. 89:7; ISSN JCPSA
• Country of Publication: United States
• Language: English

Related Subjects

640304* -- Atomic
Molecular & Chemical Physics-- Collision Phenomena
656003 -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
74 ATOMIC AND MOLECULAR PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BEAMS
COLLISIONS
CROSS SECTIONS
ELECTRON BEAMS
ELECTRON COLLISIONS
ELECTRON-MOLECULE COLLISIONS
ELECTRONIC CIRCUITS
ELEMENTS
ENERGY RANGE
ETCHING
FLUORIDES
FLUORINE COMPOUNDS
HALIDES
HALOGEN COMPOUNDS
INTEGRATED CIRCUITS
IONIZATION
KEV RANGE
KEV RANGE 01-10
LEPTON BEAMS
MATERIALS
MICROELECTRONIC CIRCUITS
MOLECULE COLLISIONS
PARTICLE BEAMS
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON FLUORIDES
SURFACE FINISHING