Epitaxy and monolayer patterning of solution-derived LiNbO{sub 3} thin layers
- Univ. of Illinois, Urbana, IL (United States)
Integrated lithium niobate (LiNbO{sub 3}) thin layers show promise for efficient electrooptic, nonlinear optic, and optical amplifier applications. Solution-derived LiNbO{sub 3} thin layers have been deposited on sapphire substrates, allowing low temperature processing, control of stoichiometry, uniform doping and heteroepitaxy. Transmission electron microscopy of the LiNbO{sub 3}/substrate interface suggests the structure consists of high oriented grains with slight rotational variance to accommodate lattice mismatch. For use of such films as devices, the ability to pattern waveguides and other structures is desired. Modification of the substrate surface with patterns of hydrophobic monolayers allows control of deposition of solution precursors. Ambient, selective deposition of (00.1) oriented LiNbO{sub 3} heteroepitaxial strip waveguides with lateral dimensions as small as 4 {micro}m is demonstrated.
- DOE Contract Number:
- FG02-91ER45439
- OSTI ID:
- 392167
- Report Number(s):
- CONF-951155--; ISBN 1-55899-304-5
- Country of Publication:
- United States
- Language:
- English
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