Patterning of dielectric oxide thin layers by microcontact printing of self- assembled monolayers
- Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (United States)
- Department of Materials Science and Engineering, Fredrick Seitz Materials Research Laboratory, and Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (United States)
- School of Chemical Sciences, Fredrick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801 (United States)
This communication describes a technique used to pattern oxide thin layers using microcontact printing ({mu}CP) and sol-gel deposition. The technique involves {mu}CP of self-assembled monolayers (SAM`s) of alkylsiloxane on various substrates (SiO{sub 2}/Si, sapphire, ITO, and glass), followed by deposition of oxide thin layers from sol-gel precursors. Delamination of oxide layers from SAM-derivatized regions allows selective deposition of crystalline dielectric oxide layers on underivatized regions. To demonstrate the viability of this technique for integrated microelectronics and optics applications, patterned (Pb,La)TiO{sub 3} (PLT) and LiNbO{sub 3} layers were deposited on sapphire, silicon, and indium tin oxide (ITO) substrates. Use of lattice-matched substrates allows lithography-free deposition of patterned heteroepitaxial oxide layers. Strip waveguides of heteroepitaxial LiNbO{sub 3} with 4 {mu}m lateral dimensions were fabricated on sapphire. Dielectric measurements for patterned PLT thin layers on ITO are also reported. {copyright} {ital 1995} {ital Materials} {ital Research} {ital Society}.
- Research Organization:
- University of Illinois
- DOE Contract Number:
- FG02-91ER45439
- OSTI ID:
- 147757
- Journal Information:
- Journal of Materials Research, Journal Name: Journal of Materials Research Journal Issue: 12 Vol. 10; ISSN JMREEE; ISSN 0884-2914
- Country of Publication:
- United States
- Language:
- English
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