The Advanced Photon Source Metrology Laboratory
Journal Article
·
· Review of Scientific Instruments
- Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439 (United States)
The Advanced Photon Source (APS) Metrology Laboratory is now operational in its permanent location in a cleanroom environment on the Experiment Hall floor of the APS site. The Metrology Laboratory will provide characterization of the figure and finish of x-ray optical surfaces for the user community using visible light instrumentation. Three noncontact instruments are now available for measuring surface features with lateral resolution from less than a micron to lengths of 2 meters and with a vertical resolution as small as an Angstrom. This paper gives a brief description of the three instruments used to cover this spatial frequency range and other associated issues, such as the environment and cleanliness of the laboratory. {copyright} {ital 1996 American Institute of Physics.}
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 389599
- Report Number(s):
- CONF-9510119--
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 9 Vol. 67; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
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