Optical metrology at the NSLS-II

Journal Article · Wed Dec 08 04:00:00 EST 2010 · Nuclear Instruments and Methods in Physics Research, Section A

DOI:https://doi.org/10.1016/j.nima.2010.11.140· OSTI ID:1020868

Kaznatcheev, K; Takacs, P Z

Rapid progress in synchrotron optics performance places a high demand on optical characterization techniques used to validate surface parameters prior to installation of the X-ray optics. It is now necessary to characterize optical surface figure and slope errors and roughness on meter-long optics over spatial frequencies as short as 0.1 {micro}m The new NSLS-II Optical Metrology Laboratory (OML) includes instruments for measuring: (1) long spatial frequency figure errors with a ZYGO MST Fizeau-type 4* interferometer, capable of 0.1 nm sensitivity, (2) mid spatial frequencies with an upgraded ZYGO NewView 6300 white light interferometric microscope, capable of reaching 0.1 nm accuracy at a lateral resolution of 1 {micro}m, (3) high frequency roughness with an AFM (Nanosurf AG) with linearity better than 0.2% over the 80 {micro}m measurement area and sensitivity approaching 0.01 nm, and (4) slope errors with a long trace profiler currently under development that will be able to reach 50 nrad slope error accuracy. At present, the OML supports the NSLS-II R&D efforts and provides ongoing testing for NSLS optics. Future plans include the construction of a specialized metrology beamline for at-wavelength metrology, radiometry, in situ surface figuring, crystal optics characterization, and instrumentation development.

• Research Organization: BROOKHAVEN NATIONAL LABORATORY (BNL)
• Sponsoring Organization: DOE - OFFICE OF SCIENCE
• DOE Contract Number: AC02-98CH10886
• OSTI ID: 1020868
• Report Number(s): BNL--94663-2011-JA; 39KC02000
• Journal Information: Nuclear Instruments and Methods in Physics Research, Section A, Journal Name: Nuclear Instruments and Methods in Physics Research, Section A Journal Issue: 1 Vol. 649; ISSN 0168-9002
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
ACCURACY
CONSTRUCTION
MIRRORS
OPTICS
Optical metrology
PERFORMANCE
RESOLUTION
ROUGHNESS
SENSITIVITY
SYNCHROTRON RADIATION
SYNCHROTRONS
Synchrotron radiation
TESTING
X-ray mirrors