Uncooled thermal imaging using a piezoresistive microcantilever

Journal Article · Fri Nov 01 04:00:00 EST 1996 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.117309· OSTI ID:389261

Oden, P I; Datskos, P G; Thundat, T; Warmack, R J ^[1]

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1. Health Science Research Division, Chemical and Biological Physics Section, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6123 (United States)

The operation of an uncooled, microcantilever-based infrared (IR) imaging device is demonstrated. Bending of the microcantilever is a function of the IR radiation intensity incident on the cantilever surface. The infrared image of the source is obtained by rastering a microfabricated cantilever over the image formed at the focal plane of a concave mirror. The bending variation of the microcantilever, as it scanned the focal plane of the mirror, is used to construct an infrared image of the source in front of the mirror. The thermal image obtained by scanning a single element cantilever is presented. {copyright} {ital 1996 American Institute of Physics.}

• Research Organization: Oak Ridge National Laboratory
• DOE Contract Number: AC05-96OR22464
• OSTI ID: 389261
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 21 Vol. 69; ISSN 0003-6951; ISSN APPLAB
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
BENDING
ELECTRIC CONDUCTIVITY
IMAGE SCANNERS
INFRARED RADIATION
MIRRORS
PIEZOELECTRICITY
TEMPERATURE GRADIENTS