Remote infrared radiation detection using piezoresistive microcantilevers

Journal Article · Fri Nov 01 04:00:00 EST 1996 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.117752· OSTI ID:389235

Datskos, P G; Oden, P I; Thundat, T; Wachter, E A; Warmack, R J; Hunter, S R ^[1]

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1. Health Sciences Research Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)

A novel micromechanical infrared (IR) radiation sensor has been developed using commercially available piezoresistive microcantilevers. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress between the top layer (coating) and the substrate. The bending causes a change in the piezoresistance and is proportional to the amount of heat absorbed. The microcantilever IR sensor exhibits two distinct thermal responses: a fast one ({lt}ms) and a slower one ({approximately}10 ms). A noise equivalent power (at a modulation frequency of 30 Hz) was estimated to be {approximately}70 nW/Hz{sup 1/2}. This value can be further reduced by designing microcantilevers with better thermal isolation that can allow microcantilevers to be used as uncooled IR radiation detectors. {copyright} {ital 1996 American Institute of Physics.}

• Research Organization: Oak Ridge National Laboratory
• DOE Contract Number: AC05-96OR22464
• OSTI ID: 389235
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 20 Vol. 69; ISSN 0003-6951; ISSN APPLAB
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
ABSORPTION
BENDING
DESIGN
HEAT SINKS
INFRARED RADIATION
PIEZOELECTRICITY
RADIATION DETECTION
SENSORS
STRESSES