New routes in the preparation of mechanically hard films
- Northwestern Univ., Evanston, IL (United States)
Superhard nitride superlattice coatings with nanometer-scale multilayers have hardnesses exceeding 50 gigapascals, making these films highly resistant at abrasion. The nitride superlattice films can be deposited economically by reactive sputtering in production-size equipment on a variety of substrates. A model for the superlattice strength enhancement has been developed that accurately predicts which materials can be used together to produce the enhanced hardness. Advancements in sputtering technology-specifically, pulsed dc power and reactive-gas partial-pressure control-make it possible to reactively deposit nonconducting oxide films at high deposition rates. This technology is being used along with the superlattice strength model in the development of oxide superlattice films. 16 refs., 3 figs.
- Sponsoring Organization:
- USDOE
- OSTI ID:
- 387404
- Journal Information:
- Science, Journal Name: Science Journal Issue: 5277 Vol. 273; ISSN SCIEAS; ISSN 0036-8075
- Country of Publication:
- United States
- Language:
- English
Similar Records
Reactive sputter deposition of superhard polycrystalline nanolayered coatings
Hardness enhancement and oxidation resistance of nanocrystalline TiN/Mo {sub x}C multilayer films
Recent developments in reactively sputtered optical thin films
Book
·
Mon Dec 30 23:00:00 EST 1996
·
OSTI ID:490756
Hardness enhancement and oxidation resistance of nanocrystalline TiN/Mo {sub x}C multilayer films
Journal Article
·
Thu Aug 10 00:00:00 EDT 2006
· Materials Research Bulletin
·
OSTI ID:20895245
Recent developments in reactively sputtered optical thin films
Conference
·
Mon Nov 30 23:00:00 EST 1981
·
OSTI ID:5554130