A low power, tight seal, polyimide electrostatic microvalve

Conference · Wed Apr 17 04:00:00 EDT 1996

OSTI ID:385587

Lee, A P; Hamilton, J; Trevino, J

An electrostatically-actuated polyimide microvalve is developed with sub-micron gaps between the electrodes to provide high force with low power consumption (< 1 mW). Built-in residual stress results in a curled bimorph cantilever which allows for a n-Licroactuator with large displacement. This microactuator is used to open and close a fluid path hole etched in silicon for a microvalve. The microactuator can be actuated with 25V for a displacement of 200 {mu}m. The cantilever actuator is mainly composed of polyimide, which is flexible enough to conform over the flow hole, thereby eliminating the need for the design of a valve seat.

• Research Organization: Lawrence Livermore National Lab., CA (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 385587
• Report Number(s): UCRL-JC--123423; CONF-961105--10; ON: DE96014046
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
ACTUATORS
CONTROL SYSTEMS
DESIGN
ELECTRODES
IMIDES
LEAKAGE CURRENT
MECHANICAL PROPERTIES
ORGANIC POLYMERS
RESIDUAL STRESSES
VALVES