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Molecular dynamics simulations of nanoidentation of silicon nitride

Book ·
OSTI ID:364057

This is a report of work in progress on 10 million atom Molecular Dynamics (MD) simulations of nanoindentation of crystalline and amorphous silicon nitride (Si{sub 3}N{sub 4}). Nanoindentation is used to determine mechanical properties of extremely thin films such as hardness and elastic moduli. The authors report load-displacement curves for several Si{sub 3}N{sub 4} configurations using an idealized non-deformable indenter and analyze the local stress distributions in the vicinity of the indenter tip. Preliminary results for surface adhesion using Si{sub 3}N{sub 4} for both tip and substrate are also reported.

Sponsoring Organization:
National Science Foundation, Washington, DC (United States); USDOE, Washington, DC (United States); Defense Advanced Research Projects Agency, Arlington, VA (United States)
OSTI ID:
364057
Report Number(s):
CONF-981104--
Country of Publication:
United States
Language:
English