A variable cryogenic temperature near-field scanning optical microscope
- Department of Physics, University of Virginia, Charlottesville, Virginia 22901 (United States)
We describe a novel variable (cryogenic) temperature near-field scanning optical microscope (VT-NSOM) designed specifically for submicron imaging of materials and devices over a temperature range of 12{endash}300 K. In high vacuum, we cool only the sample stage of the compact NSOM, thereby maintaining a large scan area (35&hthinsp;{mu}m{times}35&hthinsp;{mu}m) at low temperatures and enabling rapid ({approximately}30&hthinsp;min) temperature changes. With incorporation into an external conventional optical microscope, the VT-NSOM is capable of imaging a single submicron feature over the entire temperature range. We demonstrate the performance of the instrument by examining the photoresponse of threading dislocation defects in relaxed GeSi films. {copyright} {ital 1999 American Institute of Physics.}
- OSTI ID:
- 361609
- Journal Information:
- Review of Scientific Instruments, Vol. 70, Issue 8; Other Information: PBD: Aug 1999
- Country of Publication:
- United States
- Language:
- English
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