Effects of tube length and radius for inner surface plasma immersion ion implantation using an auxiliary electrode
- Univ. of Hong Kong, Kowloon (Hong Kong). Dept. of Physics and Materials Science
- Australian National Univ., Canberra (Australia). Plasma Research Lab.
Inner surface modification of many industrial components, such as dies, bushings, pipes, etc. using plasma immersion ion implantation (PIII) is of practical importance and has attracted the attention of physicists and materials scientists. One drawback of PIII of inner surfaces is low ion impact energy. It has been shown that by inserting a zero potential conductive auxiliary electrode along the axis of the implanted cylindrical tube, the average ion impact energy can be raised. It has also been determined that the normalized auxiliary radius should range from 0.1--0.3 in order to maximize the dose and produce a larger number of ions with high impact energy. Here, plasma immersion ion implantation of the inner surface of a finite-length small cylindrical tube with a coaxial, grounded auxiliary electrode is modeled using a two-dimensional particle-in-cell model. Various ratios of tube lengths against tube diameters are simulated. It is found that a peak in total accumulated dose is observed near the ends of the tube. Provided that it is long enough, the ions that come from the outside of the tube cannot pass through the middle-plane. That is, the tube can be divided conceptually into an end and a middle region, while the middle remains empty and all the flux goes to the end. In other words, a one-dimensional model can be applied to the middle region. The simulation results including the enhanced ion dose agrees with the experimental data.
- OSTI ID:
- 357691
- Journal Information:
- IEEE Transactions on Plasma Science, Vol. 27, Issue 1; Other Information: PBD: Feb 1999
- Country of Publication:
- United States
- Language:
- English
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