Improving the impact energy by using auxiliary electrode in a cylinder bore

Conference · Tue Dec 31 04:00:00 EST 1996

OSTI ID:419693

Zeng, X C; Xing, D Z; Gao, Y ^[1]; Wang, S Y; Liu, A G; Tang, B Y ^[1]; Chu, P K ^[1]

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1. City Univ. of Hong Kong, Kowloon (Hong Kong). Dept. of Physics and Materials Science

Plasma immersion ion implantation (PIII) is a promising technique for surface modification of materials. Because of its non line-of-sight process, there is the intriguing possibility of implanting interior surfaces. If the radius R of a bore is many Debye lengths, the bore will be plasma-filled and it is possible to implant into the sidewalls of the bore. The authors are proposing to use an auxiliary electrode, a conductive cylindrical bar where potential is always zero at the axis of the cylindrical bore, to improve the impact energy. They have calculated the structure of the ion-matrix sheath in an infinitely long cylindrical bore (R {le} D) with the auxiliary electrode and analyzed the dependence of its radius on the electric field in the bore. These results show that the auxiliary electrode improves the distribution of the potential and electric field in the cylindrical bore. Because the presence of the auxiliary electrode generates an electric field which does not change when the ions are implanted into the sidewalls, it is hopeful that this technique can improve the impact energy for plasma immersion ion implantation into the interior sidewalls of a cylindrical bore.

• OSTI ID: 419693
• Report Number(s): CONF-960634--
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ELECTRIC POTENTIAL
ION IMPLANTATION
MATERIALS
PERFORMANCE
PLASMA SHEATH
SURFACE TREATMENTS