Lasers and beam delivery options for polycrystalline thin-film scribing

Journal Article · Mon Mar 01 04:00:00 EST 1999 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.57951· OSTI ID:355360

Compaan, A D; Matulionis, I; Nakade, S ^[1]

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1. The University of Toledo, Department of Physics and Astronomy, Toledo, Ohio 43606 (United States)

We have investigated the use of several different types of lasers for scribing of the thin film materials: CdTe, CuInGaSe{sub 2}, ZnO, SnO{sub 2}, Mo, Al, and Au. The lasers included several types of Nd: YAG (1064 and 532 nm wavelengths), Cu vapor (511/578 nm), XeCl excimer (308 nm), and KrF excimer (248 nm). Pulse durations ranged from {approximately}0.1 nsec to {approximately}250 ns. We found that the Nd: YAG systems work well for almost all of the above materials except for the transparent conductor ZnO, for which the two excimer lasers showed good performance. Pulse duration was found generally not to be critical except for the case of CIGS on Mo where longer pulse durations appear advantageous. {copyright} {ital 1999 American Institute of Physics.}

• Sponsoring Organization: USDOE
• OSTI ID: 355360
• Report Number(s): CONF-980935--
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 462; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
LASER RADIATION
OPTICAL SYSTEMS
PHOTOVOLTAIC CELLS
SURFACE TREATMENTS
THERMODYNAMIC PROPERTIES
THIN FILMS