Pulsed laser deposition of ZnO nanocluster films by Cu-vapor laser

Journal Article · Thu Jul 01 04:00:00 EDT 1999 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.370857· OSTI ID:354508

Dinh, L N; Schildbach, M A; Balooch, M; McLean, W II ^[1]

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1. Lawrence Livermore National Laboratory, Livermore, California 94551 (United States)

The dependence of stoichiometry, grain size, cathodoluminescence colors, adhesion, and surface morphology of zinc oxide films, deposited by a Cu-vapor laser at room temperature, as a function of oxygen ambient pressure during synthesis were investigated. Auger electron spectroscopy showed that ZnO films with a Zn/O ratio close to 1 were obtained at oxygen pressures {gt}10{sup {minus}1}&hthinsp;Torr. X-ray diffraction revealed that pulsed laser deposited zinc oxide films were composed mainly of nanocrystals, the average grain size of which grew from 5 to 17.5 nm as the oxygen pressure was increased from 10{sup {minus}5} to 1 Torr. The surface morphology of the films, as determined by secondary electron microscopy, also exhibited increasing roughness as the grain size increased. Films grown in an oxygen pressure {gt}1.5{times}10{sup {minus}1}&hthinsp;Torr glowed blue under electron bombardment, while slightly substoichiometric films glowed white under similar excitation. Films deposited in an oxygen background pressure up to 1.5{times}10{sup {minus}1}&hthinsp;Torr exhibited good adhesion to substrates. Deposition rate on the order of 4.6 nm/s was obtained. {copyright} {ital 1999 American Institute of Physics.}

• OSTI ID: 354508
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 2 Vol. 86; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ADHESION
CATHODOLUMINESCENCE
DEPOSITION
ELECTRON MICROSCOPY
GRAIN SIZE
STOICHIOMETRY
THIN FILMS
X-RAY DIFFRACTION
ZINC COMPOUNDS
ZINC OXIDES