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Title: Pulsed laser deposition of ZnO nanocluster films by Cu-vapor laser

Abstract

The dependence of stoichiometry, grain size, cathodoluminescence colors, adhesion, and surface morphology of zinc oxide films, deposited by a Cu-vapor laser at room temperature, as a function of oxygen ambient pressure during synthesis were investigated. Auger electron spectroscopy showed that ZnO films with a Zn/O ratio close to 1 were obtained at oxygen pressures {gt}10{sup {minus}1}&hthinsp;Torr. X-ray diffraction revealed that pulsed laser deposited zinc oxide films were composed mainly of nanocrystals, the average grain size of which grew from 5 to 17.5 nm as the oxygen pressure was increased from 10{sup {minus}5} to 1 Torr. The surface morphology of the films, as determined by secondary electron microscopy, also exhibited increasing roughness as the grain size increased. Films grown in an oxygen pressure {gt}1.5{times}10{sup {minus}1}&hthinsp;Torr glowed blue under electron bombardment, while slightly substoichiometric films glowed white under similar excitation. Films deposited in an oxygen background pressure up to 1.5{times}10{sup {minus}1}&hthinsp;Torr exhibited good adhesion to substrates. Deposition rate on the order of 4.6 nm/s was obtained. {copyright} {ital 1999 American Institute of Physics.}

Authors:
; ; ;  [1]
  1. Lawrence Livermore National Laboratory, Livermore, California 94551 (United States)
Publication Date:
OSTI Identifier:
354508
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 86; Journal Issue: 2; Other Information: PBD: Jul 1999
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ZINC COMPOUNDS; ZINC OXIDES; THIN FILMS; STOICHIOMETRY; GRAIN SIZE; ADHESION; CATHODOLUMINESCENCE; DEPOSITION; X-RAY DIFFRACTION; ELECTRON MICROSCOPY

Citation Formats

Dinh, L N, Schildbach, M A, Balooch, M, and McLean, W II. Pulsed laser deposition of ZnO nanocluster films by Cu-vapor laser. United States: N. p., 1999. Web. doi:10.1063/1.370857.
Dinh, L N, Schildbach, M A, Balooch, M, & McLean, W II. Pulsed laser deposition of ZnO nanocluster films by Cu-vapor laser. United States. https://doi.org/10.1063/1.370857
Dinh, L N, Schildbach, M A, Balooch, M, and McLean, W II. 1999. "Pulsed laser deposition of ZnO nanocluster films by Cu-vapor laser". United States. https://doi.org/10.1063/1.370857.
@article{osti_354508,
title = {Pulsed laser deposition of ZnO nanocluster films by Cu-vapor laser},
author = {Dinh, L N and Schildbach, M A and Balooch, M and McLean, W II},
abstractNote = {The dependence of stoichiometry, grain size, cathodoluminescence colors, adhesion, and surface morphology of zinc oxide films, deposited by a Cu-vapor laser at room temperature, as a function of oxygen ambient pressure during synthesis were investigated. Auger electron spectroscopy showed that ZnO films with a Zn/O ratio close to 1 were obtained at oxygen pressures {gt}10{sup {minus}1}&hthinsp;Torr. X-ray diffraction revealed that pulsed laser deposited zinc oxide films were composed mainly of nanocrystals, the average grain size of which grew from 5 to 17.5 nm as the oxygen pressure was increased from 10{sup {minus}5} to 1 Torr. The surface morphology of the films, as determined by secondary electron microscopy, also exhibited increasing roughness as the grain size increased. Films grown in an oxygen pressure {gt}1.5{times}10{sup {minus}1}&hthinsp;Torr glowed blue under electron bombardment, while slightly substoichiometric films glowed white under similar excitation. Films deposited in an oxygen background pressure up to 1.5{times}10{sup {minus}1}&hthinsp;Torr exhibited good adhesion to substrates. Deposition rate on the order of 4.6 nm/s was obtained. {copyright} {ital 1999 American Institute of Physics.}},
doi = {10.1063/1.370857},
url = {https://www.osti.gov/biblio/354508}, journal = {Journal of Applied Physics},
number = 2,
volume = 86,
place = {United States},
year = {Thu Jul 01 00:00:00 EDT 1999},
month = {Thu Jul 01 00:00:00 EDT 1999}
}