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U.S. Department of Energy
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Capacitance extraction from complex 3D interconnect structures

Conference ·
OSTI ID:350894
; ; ; ;  [1]; ;  [2]
  1. Los Alamos National Lab., NM (United States). Theoretical Div.
  2. Motorola, Austin, TX (United States)

A new tool has been developed for calculating the capacitance matrix for complex 3D interconnect structures involving multiple layers of irregularly shaped interconnect, imbedded in different dielectric materials. This method utilizes a new 3D adaptive unstructured grid capability, and a linear finite element algorithm. The capacitance is determined from the minimum in the total system energy as the nodes are varied to minimize the error in the electric field in the dielectric(s).

Research Organization:
Los Alamos National Lab., NM (United States)
Sponsoring Organization:
USDOE Assistant Secretary for Management and Administration, Washington, DC (United States)
DOE Contract Number:
W-7405-ENG-36
OSTI ID:
350894
Report Number(s):
LA-UR--99-888; CONF-990415--; ON: DE99002724
Country of Publication:
United States
Language:
English