Multiple Input Microcantilever Sensor with Capacitive Readout
Conference
·
OSTI ID:3443
- ORNL
A surface-micromachined MEMS process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Combined hydrogen and mercury-vapor detection was achieved with a palm-sized, self-powered module with spread-spectrum telemetry reporting.
- Research Organization:
- Oak Ridge National Lab., TN (US)
- Sponsoring Organization:
- USDOE Office of Energy Research (ER) (US)
- DOE Contract Number:
- AC05-96OR22464
- OSTI ID:
- 3443
- Report Number(s):
- ORNL/CP-101002
- Country of Publication:
- United States
- Language:
- English
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