Pore structure modification of alumina support by SiC-Si{sub 3}N{sub 4} nanoparticles prepared by the particle precipitation aided chemical vapor deposition

Journal Article · Mon Mar 01 04:00:00 EST 1999 · Industrial and Engineering Chemistry Research

DOI:https://doi.org/10.1021/ie9805990· OSTI ID:338597

Hong, L S; Lai, H T ^[1]

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1. National Taiwan Univ. of Science and Technology, Taipei (Taiwan, Province of China). Dept. of Chemical Engineering

A technique to reduce the permeability decrease in a chemical vapor deposition pore modification of {alpha}-alumina support by a SiH{sub 4}/C{sub 2}H{sub 2}/NH{sub 3} reaction system has been proposed. SiC-Si{sub 3}N{sub 4} nanoparticles were formed in the gas phase of a hot-wall reactor at a temperature of 1,323 K and deposited in/on the pore of the support to form a modification layer. The structure of the particles was confirmed by Fourier transform infrared and high-resolution transmission electron microscopy techniques to be a composite of crystalline SiC dispersed in an amorphous phase containing Si{sub 3}N{sub 4}. The structure retarded the sintering between the deposited particles and resulted in a modification layer with a large porosity on the surface of the membrane. A single gas permeation measurement showed that a reduction of the average pore diameter from 0.30 to 0.21 {micro}m accompanied only an approximate 20% decrease in permeability: 31% reduction of the permeability decrease is achieved compared with the value predicted by a dense film deposition on the wall of the pore.

• OSTI ID: 338597
• Journal Information: Industrial and Engineering Chemistry Research, Journal Name: Industrial and Engineering Chemistry Research Journal Issue: 3 Vol. 38; ISSN IECRED; ISSN 0888-5885
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM OXIDES
CHEMICAL VAPOR DEPOSITION
PERMEABILITY
PORE STRUCTURE
POROSITY
SILICON CARBIDES
SILICON NITRIDES