Radiation response of a MEMS accelerometer: An electrostatic force

Journal Article · Tue Dec 01 04:00:00 EST 1998 · IEEE Transactions on Nuclear Science

DOI:https://doi.org/10.1109/23.736528· OSTI ID:323955

Edmonds, L D; Swift, G M; Lee, C I ^[1]

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1. California Inst. of Tech., Pasadena, CA (United States). Jet Propulsion Lab.

Particle irradiation on the mechanical sensor of the ADXL50 microelectromechanical accelerometer shifts the output voltage. An earlier conclusion, that a dielectric below the sensor becomes charged, is extended by quantifying the effect of this charge on device output. It is shown that an electrostatic force is consistent with the observation that the output voltage shift is independent of acceleration. Possible charging mechanisms are suggested. An appendix derives a convenient algorithm for calculating electrostatic forces, which may also be used for other MEMS devices.

• OSTI ID: 323955
• Report Number(s): CONF-980705--
• Journal Information: IEEE Transactions on Nuclear Science, Journal Name: IEEE Transactions on Nuclear Science Journal Issue: 6Pt1 Vol. 45; ISSN 0018-9499; ISSN IETNAE
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
ACCELEROMETERS
CHARGE COLLECTION
ELECTRIC POTENTIAL
HYBRID SYSTEMS
PHYSICAL RADIATION EFFECTS
RESPONSE FUNCTIONS