Fast deposited microcrystalline silicon solar cells
Conference
·
OSTI ID:304357
- Univ. of Neuchatel (Switzerland). Inst. of Microtechnology
- Univ. of Konstanz (Germany)
Microcrystalline silicon solar cells with AM 1.5 conversion efficiency above 5% have been deposited at deposition rates in excess of 10 {angstrom}/s. This is achieved by VHF-GD at an excitation frequency of 130 MHz. By increasing the plasma power at a dilution ratio of 7.5% silane/(silane+hydrogen) there first appears a morphological transition from a-Si:H to {micro}c-Si:H and then an increase in deposition rate. Crystallographic properties and solar cell efficiencies vary thereby in a significant manner.
- OSTI ID:
- 304357
- Report Number(s):
- CONF-970953--
- Country of Publication:
- United States
- Language:
- English
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