Focused ion beam milling of polycrystalline diamond

Shin, Swanee J.; Bayu Aji, Leonardus Bimo; Kim, Eunjeong J.; Goodelman, Daniel C.; Forien, Jean-Baptiste; Kucheyev, Sergei O.

doi:10.1016/j.diamond.2025.113274

Focused ion beam milling of polycrystalline diamond

Journal Article · Sat Jan 03 00:00:00 EST 2026 · Diamond and Related Materials

DOI:https://doi.org/10.1016/j.diamond.2025.113274· OSTI ID:3019701

^[1]; Bayu Aji, Leonardus Bimo ^[1]; Kim, Eunjeong J. ^[1]; Goodelman, Daniel C. ^[1]; Forien, Jean-Baptiste ^[1]; Kucheyev, Sergei O. ^[1]

Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Focused ion beam (FIB) technology has a large potential for precise milling of ultrahard materials such as diamond. However, studies of the sputtering of diamond with ion species and energies relevant to the FIB technology are scarce. Here, we report a systematic study of the sputtering of polycrystalline diamond surfaces with ion beams in a wide range of ion energies (2 - 30 keV), incident beam angles (0 - 80°), and ion masses (N, O, Ar, and Xe). Results show that the sputter yield is relatively insensitive to ion energy but strongly depends on the ion species and incident beam angles. Bombardment with O ions results in sputter yields that are significantly larger than ballistic predictions due to chemical etching effects. Characteristic surface ripples develop for oblique beam incidence angle irradiation. The critical beam tilt angle for the onset of ripple formation and the wavelength of the ripples depend on ion species and energies. Ripples appear to suppress ion reflection at high beam tilt angles and, hence, a peak in the sputter yield angular dependence. In conclusion, these results have direct implications for the development of process parameter maps for high-precision ion-beam milling of diamond.

View Accepted Manuscript (DOE)

Research Organization:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Organization:: USDOE Laboratory Directed Research and Development (LDRD) Program; USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC52-07NA27344

Other Award/Contract Number:: 23-ERD-033

OSTI ID:: 3019701

Report Number(s):: LLNL--JRNL-2016034

Journal Information:: Diamond and Related Materials, Journal Name: Diamond and Related Materials Vol. 162; ISSN 0925-9635

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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