MEMS: A new approach to micro-optics
MicroElectroMechanical Systems (MEMS) and their fabrication technologies provide great opportunities for application to micro-optical systems (MOEMS). Implementing MOEMS technology ranges from simple, passive components to complicated, active systems. Here, an overview of polysilicon surface micromachining MEMS combined with optics is presented. Recent advancements to the technology, which may enhance its appeal for micro-optics applications are emphasized. Of all the MEMS fabrication technologies, polysilicon surface micromachining technology has the greatest basis in and leverages the most the infrastructure for silicon integrated circuit fabrication. In that respect, it provides the potential for very large volume, inexpensive production of MOEMS. This paper highlights polysilicon surface micromachining technology in regards to its capability to provide both passive and active mechanical elements with quality optical elements.
- Research Organization:
- Sandia National Labs., Intelligent Micromachine Dept., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 292834
- Report Number(s):
- SAND-97-2641C; CONF-971192-; ON: DE98004024; TRN: AHC2DT08%%15
- Resource Relation:
- Conference: MOEMS `97: international conference on optical MEMS and their applications, Nara (Japan), 18 Nov 1997; Other Information: PBD: 1997
- Country of Publication:
- United States
- Language:
- English
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