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Homoepitaxial growth of GaN using molecular beam epitaxy

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.363112· OSTI ID:286539
; ; ; ; ;  [1]; ;  [2];  [3]; ; ; ;  [4]
  1. Lawrence Berkeley National Laboratory and Department of Materials Science, University of California, Berkeley, California 94720 (United States)
  2. Lawrence Berkeley National Laboratory, Berkeley, California 94720 (United States)
  3. American Xtal Technology, Dublin, California 94568 (United States)
  4. Unipress, Polish Academy of Sciences, 01-142 Warszawa (Poland)

In this article, experimental results are presented for the homoepitaxial deposition of a GaN overlayer onto a bulk single-crystal GaN substrate using molecular beam epitaxy. Transmission electron microscopy shows a superior structural quality of the deposited GaN overlayer when compared to heteroepitaxially grown layers. Photoluminescence shows narrow excitonic emission (3.467 eV) and the very weak yellow luminescence, whereas the bulk substrate luminescence is dominated by this deep level emission. These results show that homoepitaxy of GaN can be used to establish benchmark values for the optoelectronic properties of GaN thin films. {copyright} {ital 1996 American Institute of Physics.}

Research Organization:
Lawrence Berkeley National Laboratory
DOE Contract Number:
AC03-76SF00098
OSTI ID:
286539
Journal Information:
Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 4 Vol. 80; ISSN JAPIAU; ISSN 0021-8979
Country of Publication:
United States
Language:
English