Pulsed laser ablation-deposition of La{sub 0.5}Sr{sub 0.5}CoO{sub 3} for use as electrodes in nonvolatile ferroelectric memories

Journal Article · Sat Jun 01 04:00:00 EDT 1996 · Journal of Materials Research

DOI:https://doi.org/10.1557/JMR.1996.0189· OSTI ID:285869

Dat, R; Auciello, O; Lichtenwalner, D J; Kingon, A I ^[1]

---

1. Department of Materials Science & Engineering, North Carolina State University, Raleigh, North Carolina 27695-7919 (United States)

La{sub 0.5}Sr{sub 0.5}CoO{sub 3} (LSCO) thin films have been deposited on (100) MgO substrates using pulsed laser ablation-deposition (PLAD). The crystallographic orientation of LSCO was found to be dependent on the surface treatment of (100) MgO prior to deposition. PLAD deposition parameters were optimized to yield LSCO films with an RMS surface roughness of 40{endash}50 A. A smooth surface morphology was reproduced as long as the oxygen content of the LSCO target was preserved. Otherwise, {open_quote}{open_quote}splashing{close_quote}{close_quote} occurred which resulted in the transfer of condensed particles from molten spherical globules of LSCO from the target to the substrate. Splashing was subsequently eliminated and smooth surface quality was restored after annealing the LSCO target at 550{degree}C in oxygen for 3 h. Optical emission spectroscopy (OES) of the LSCO{close_quote}s plume identified excited atomic cobalt neutrals, excited singly ionized strontium and lanthanum, and excited molecular LaO species. Oxygen interaction with the plume produced no new species. Furthermore, the OES data suggest that the observed LaO molecules were not created by the chemical reaction between La and O{sub 2} during ablation, but were ejected directly from the target during the PLAD process. {copyright} {ital 1996 Materials Research Society.}

• OSTI ID: 285869
• Journal Information: Journal of Materials Research, Journal Name: Journal of Materials Research Journal Issue: 6 Vol. 11; ISSN JMREEE; ISSN 0884-2914
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
COBALT OXIDES
ELECTRODES
ENERGY BEAM DEPOSITION FILMS
FERROELECTRIC MATERIALS
LANTHANUM OXIDES
LASER RADIATION
MICROSTRUCTURE
STRONTIUM OXIDES
THIN FILM STORAGE DEVICES