Fundamental electron collision processes relevant to low-temperature plasmas

Journal Article · Fri Mar 01 04:00:00 EST 1996 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.50131· OSTI ID:285328

Becker, K H ^[1]

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1. Physics Department, City College of C.U.N.Y., Convent Avenue and 138th Street, New York, New York 10031-9198 (United States)

This paper attempts to elucidate the mutually beneficial interaction between electron collision physics and the physics and chemistry that govern the properties of low temperature plasmas, in particular technologically relevant low-temperature processing plasmas. We hope to demonstrate how recent developments in collision physics contributed to an improved understanding of the fundamental collision processes in low-temperature plasmas, how they made possible more sophisticated modelling efforts of such plasmas and how they advanced the development of more sensitive plasma diagnostics techniques. At the same time, we hope to show how some of the many unanswered questions and challenges faced by the plasma processing community have stimulated new developments and novel approaches in atomic and electron collision physics. {copyright} {ital 1996 American Institute of Physics.}

• OSTI ID: 285328
• Report Number(s): CONF-950749--
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 363; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
CARBON FLUORIDES
CROSS SECTIONS
DISSOCIATION
DISTRIBUTION FUNCTIONS
ELECTRON-ATOM COLLISIONS
ELECTRON-MOLECULE COLLISIONS
EXCITED STATES
GLOW DISCHARGES
HELIUM
IONIZATION
PLASMA DIAGNOSTICS
SULFUR DIOXIDE