Modeling of plume dynamics in laser ablation processes for thin film deposition of materials
- Oak Ridge National Laboratory, P.O. Box 2009, Oak Ridge, Tennessee 37831-8071 (United States)
The transport dynamics of laser-ablated neutral/plasma plumes are of significant interest for film growth by pulsed-laser deposition of materials, since the magnitude and kinetic energy of the species arriving at the deposition substrate are key processing parameters. Dynamical calculations of plume propagation in vacuum and in background gas have been performed using particle-in-cell hydrodynamics, continuum gasdynamics, and scattering models. Results from these calculations are presented and compared with experimental observations. {copyright} {ital 1996 American Institute of Physics.}
- Research Organization:
- Oak Ridge National Laboratory
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 282931
- Journal Information:
- Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 5 Vol. 3; ISSN PHPAEN; ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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