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Modeling of plume dynamics in laser ablation processes for thin film deposition of materials

Conference ·
OSTI ID:204128
The transport dynamics of laser-ablated neutral/plasma plumes are of significant interest for film growth by pulsed-laser deposition of materials since the magnitude and kinetic energy of the species arriving at the deposition substrate are key processing parameters. Dynamical calculations of plume propagation in vacuum and in background gas have been performed using particle-in-cell hydrodynamics, continuum gas dynamics, and scattering models. Results from these calculations are presented and compared with experimental observations.
Research Organization:
Oak Ridge National Lab., TN (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
AC05-84OR21400
OSTI ID:
204128
Report Number(s):
CONF-951182--11; ON: DE96005737
Country of Publication:
United States
Language:
English

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