Preparation of sharp polycrystalline tungsten tips for scanning tunneling microscopy imaging

Journal Article · Sun Dec 31 23:00:00 EST 1995 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena

DOI:https://doi.org/10.1116/1.589029· OSTI ID:278471

Zhang, R; Ivey, D G ^[1]

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1. Department of Mining, Metallurgical, and Petroleum Engineering, University of Alberta, Edmonton, Alberta, T6G 2G6 (CANADA)

The fabrication of scanning tunneling microscopy (STM) tips by dc downward electrochemical polishing and ion milling has been investigated. The influence of parameters, such as voltage, immersion depth, cutoff time, and solution concentration, on the shape and sharpness of electropolished W tips are presented. Both electropolished and ion milled tips, which were characterized by transmission electron microscopy (TEM), were tested on Au films deposited on {l_angle}100{r_angle} oriented Si. The effects of tip radius on STM images are discussed thoroughly, and the results are also compared to atomic force microscopy (AFM) and TEM images. {copyright} {ital 1996 American Vacuum Society}

• OSTI ID: 278471
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena Journal Issue: 1 Vol. 14; ISSN JVTBD9; ISSN 0734-211X
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ELECTROPOLISHING
GOLD
IMAGES
ION BEAMS
POLYCRYSTALS
PROBES
SURFACE TREATMENTS
TUNGSTEN