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Dislocation formation mechanism in strained {ital In}{sub {ital x}}Ga{sub 1{minus}{ital x}}As islands grown on GaAs(001) substrates

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.116773· OSTI ID:277114
; ; ;  [1]; ;  [2]
  1. Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720 (United States)
  2. Sandia National Laboratories, Albuquerque, New Mexico 87185-5800 (United States)

The formation mechanism of misfit dislocations in lattice-mismatched {ital In}{sub {ital x}}Ga{sub 1{minus}{ital x}}As epilayers (0.2{le}{ital x}{le}1) grown on GaAs substrates has been investigated experimentally. The results suggest that 1/3{l_angle}111{r_angle} Frank partial dislocations are grown-in at island edges in highly lattice-mismatched epilayers ({ital x}{ge}0.4). Then after further island growth 90{degree} Shockley partial dislocations are nucleated to remove the stacking faults, reacting with the Frank partials to form complete 90{degree} dislocations. An atomic model is proposed to explain the formation mechanism of the Frank partial dislocation. This model could explain the observed change in the dominant type of dislocation from the 60{degree} at small mismatches to 90{degree} edge dislocations at large lattice mismatches. {copyright} {ital 1996 American Institute of Physics.}

Research Organization:
Lawrence Berkeley National Laboratory
DOE Contract Number:
AC03-76SF00098; AC04-94AL85000
OSTI ID:
277114
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 1 Vol. 68; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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