An Impedance Humidity Sensor Based on CVD Grown WSe2 2D Films

Bhadra, Jolly; Sassi, Lucas M.; Oliveira, Eliezer Fernando; Hachtel, Jordan A.; Parangusan, Hemalatha; Mallick, Shoaib Alam; Ahmad, Zubair; Galvao, Douglas S.; Puthirath, Anand B.; Vajtai, Robert; Ajayan, Pulickel M.; Al-Thani, Noora

doi:10.1021/acsaelm.4c00863

An Impedance Humidity Sensor Based on CVD Grown WSe₂ 2D Films

Journal Article · Thu Oct 17 00:00:00 EDT 2024 · ACS Applied Electronic Materials

DOI:https://doi.org/10.1021/acsaelm.4c00863· OSTI ID:2588261

^[1]; ^[2]; Oliveira, Eliezer Fernando ^[3]; ^[4]; Parangusan, Hemalatha ^[1]; Mallick, Shoaib Alam ^[1]; ^[1]; ^[5]; Puthirath, Anand B. ^[2]; ^[2]; ^[2]; Al-Thani, Noora ^[1]

Qatar University, Doha (Qatar)
Rice University, Houston, TX (United States)
Rice University, Houston, TX (United States); São Paulo State University (Unesp) (Brazil); State University of Campinas, São Paulo (Brazil)
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
State University of Campinas, São Paulo (Brazil)

2D materials-based planar devices have been sought after for gas and humidity sensor applications owing to their high sensitivity due to their ultrathin nature and increased surface area. Herein, 2D WSe₂ films-based planner devices were fabricated to evaluate their performance for potential application in humidity sensors. The structure and morphology of the WSe₂ sensing films were studied by Raman spectroscopy, photoluminescence, optical microscopy, and scanning electron microscopy (SEM) techniques. The relative humidity-dependent sensing performances of the 2D WSe₂ films were evaluated using current–voltage (I–V), relative impedance, and complex total impedance (electrochemical impedance spectroscopy, EIS) techniques. This sensor showed a very stable and repeatable performance investigated over the period of 18 months. The response and recovery times of the WSe₂-based impedance sensors were found to be 40 and 30 s, respectively. The WSe₂ sensor exhibits a 2 ± 1% minimum hysteresis at a lower humidity level (50% RH) and around 8 ± 2% maximum hysteresis at relative humidity level (70% RH). This value of hysteresis is in the acceptable range during the initial investigation of any material to explore its potential for application in humidity sensors. The density functional theory (DFT) analysis was performed with the interaction from water molecules of the WSe₂ sample for a better understanding of the sensing mechanism of devices.

View Accepted Manuscript (DOE)

Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE; São Paulo Research Foundation (FAPESP)

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 2588261

Journal Information:: ACS Applied Electronic Materials, Journal Name: ACS Applied Electronic Materials Journal Issue: 11 Vol. 6; ISSN 2637-6113

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

References (34)

Vacancy Defects in 2D Transition Metal Dichalcogenide Electrocatalysts: From Aggregated to Atomic Configuration Wang, Xin; Wu, Jing; Zhang, Yuwei Advanced Materials, Vol. 35, Issue 50 https://doi.org/10.1002/adma.202206576	journal	March 2023
Alcohols Assisted Hydrothermal Synthesis of Defect‐Rich MoS ₂ and Their Applications in Humidity Sensing Leng, Xiaohui; Wang, Yiming; Wang, Fei Advanced Materials Interfaces https://doi.org/10.1002/admi.201900010	journal	April 2019
Thermal Expansion, Anharmonicity and Temperature-Dependent Raman Spectra of Single- and Few-Layer MoSe ₂ and WSe ₂ Late, Dattatray J.; Shirodkar, Sharmila N.; Waghmare, Umesh V. ChemPhysChem, Vol. 15, Issue 8 https://doi.org/10.1002/cphc.201400020	journal	April 2014
Multifunctional Flexible Humidity Sensor Systems Towards Noncontact Wearable Electronics Lu, Yuyao; Yang, Geng; Shen, Yajing Nano-Micro Letters, Vol. 14, Issue 1 https://doi.org/10.1007/s40820-022-00895-5	journal	July 2022
The Grotthuss mechanism Agmon, Noam Chemical Physics Letters, Vol. 244, Issue 5-6 https://doi.org/10.1016/0009-2614(95)00905-J	journal	October 1995
Liquid exfoliation of black phosphorus nanosheets and its application as humidity sensor Late, Dattatray J. Microporous and Mesoporous Materials, Vol. 225 https://doi.org/10.1016/j.micromeso.2016.01.031	journal	May 2016
Influence of Native Defects on the Electronic and Magnetic Properties of CVD Grown MoSe ₂ Single Layers Koós, Antal A.; Vancsó, Péter; Szendrő, Márton The Journal of Physical Chemistry C, Vol. 123, Issue 40 https://doi.org/10.1021/acs.jpcc.9b05921	journal	September 2019
Piezotronic Effect Enhanced Flexible Humidity Sensing of Monolayer MoS ₂ Guo, Junmeng; Wen, Rongmei; Liu, Yudong ACS Applied Materials & Interfaces, Vol. 10, Issue 9 https://doi.org/10.1021/acsami.7b17529	journal	February 2018
A quantum theory of molecular structure and its applications Bader, Richard F. W. Chemical Reviews, Vol. 91, Issue 5 https://doi.org/10.1021/cr00005a013	journal	July 1991
Electronic Structure of TiO ₂ Surfaces and Effect of Molecular Adsorbates Using Different DFT Implementations Martsinovich, Natalia; Jones, Daniel R.; Troisi, Alessandro The Journal of Physical Chemistry C, Vol. 114, Issue 51 https://doi.org/10.1021/jp109756g	journal	December 2010
The Optical Visibility of Graphene: Interference Colors of Ultrathin Graphite on SiO ₂ Roddaro, S.; Pingue, P.; Piazza, V. Nano Letters, Vol. 7, Issue 9 https://doi.org/10.1021/nl071158l	journal	September 2007
Photoluminescence from Chemically Exfoliated MoS₂ Eda, Goki; Yamaguchi, Hisato; Voiry, Damien Nano Letters, Vol. 11, Issue 12, p. 5111-5116 https://doi.org/10.1021/nl201874w	journal	December 2011
Large Area Growth and Electrical Properties of p-Type WSe ₂ Atomic Layers Zhou, Hailong; Wang, Chen; Shaw, Jonathan C. Nano Letters, Vol. 15, Issue 1 https://doi.org/10.1021/nl504256y	journal	December 2014
Nature of Electronic States in Atomically Thin MoS₂ Field-Effect Transistors Ghatak, Subhamoy; Pal, Atindra Nath; Ghosh, Arindam ACS Nano, Vol. 5, Issue 10, p. 7707-7712 https://doi.org/10.1021/nn202852j	journal	October 2011
Evolution of Electronic Structure in Atomically Thin Sheets of WS ₂ and WSe ₂ Zhao, Weijie; Ghorannevis, Zohreh; Chu, Leiqiang ACS Nano, Vol. 7, Issue 1 https://doi.org/10.1021/nn305275h	journal	December 2012
Optoelectronic devices based on electrically tunable p–n diodes in a monolayer dichalcogenide Baugher, Britton W. H.; Churchill, Hugh O. H.; Yang, Yafang Nature Nanotechnology, Vol. 9, Issue 4 https://doi.org/10.1038/nnano.2014.25	journal	March 2014
Charge-tuneable biexciton complexes in monolayer WSe2 Barbone, Matteo; Montblanch, Alejandro R. -P.; Kara, Dhiren M. Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-018-05632-4	journal	September 2018
New First Order Raman-active Modes in Few Layered Transition Metal Dichalcogenides Terrones, H.; Corro, E. Del; Feng, S. Scientific Reports, Vol. 4, Issue 1 https://doi.org/10.1038/srep04215	journal	February 2014
The combinations of hollow MoS ₂ micro@nano-spheres: one-step synthesis, excellent photocatalytic and humidity sensing properties Tan, Yinghua; Yu, Ke; Yang, Ting J. Mater. Chem. C, Vol. 2, Issue 27 https://doi.org/10.1039/C4TC00423J	journal	January 2014
Controllable growth of two-dimensional WSe ₂ using salt as co-solvent Wang, Xiangzhuo; Li, Yongkai; Zhuo, La CrystEngComm, Vol. 20, Issue 40 https://doi.org/10.1039/C8CE01162A	journal	January 2018
A consistent and accurate ab initio parametrization of density functional dispersion correction (DFT-D) for the 94 elements H-Pu Grimme, Stefan; Antony, Jens; Ehrlich, Stephan The Journal of Chemical Physics, Vol. 132, Issue 15 https://doi.org/10.1063/1.3382344	journal	April 2010
Sulfur vacancies in monolayer MoS ₂ and its electrical contacts Liu, D.; Guo, Y.; Fang, L. Applied Physics Letters, Vol. 103, Issue 18 https://doi.org/10.1063/1.4824893	journal	October 2013
QUANTUM ESPRESSO: a modular and open-source software project for quantum simulations of materials Giannozzi, Paolo; Baroni, Stefano; Bonini, Nicola Journal of Physics: Condensed Matter, Vol. 21, Issue 39, Article No. 395502 https://doi.org/10.1088/0953-8984/21/39/395502	journal	September 2009
A grid-based Bader analysis algorithm without lattice bias Tang, W.; Sanville, E.; Henkelman, G. Journal of Physics: Condensed Matter, Vol. 21, Issue 8 https://doi.org/10.1088/0953-8984/21/8/084204	journal	January 2009
Atomic-layer triangular WSe ₂ sheets: synthesis and layer-dependent photoluminescence property Xu, Kai; Wang, Zhenxing; Du, Xiaolei Nanotechnology, Vol. 24, Issue 46 https://doi.org/10.1088/0957-4484/24/46/465705	journal	October 2013
Flexible, transparent and ultra-broadband photodetector based on large-area WSe ₂ film for wearable devices Zheng, Zhaoqiang; Zhang, Tanmei; Yao, Jiandomg Nanotechnology, Vol. 27, Issue 22 https://doi.org/10.1088/0957-4484/27/22/225501	journal	April 2016
Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping Castellanos-Gomez, Andres; Buscema, Michele; Molenaar, Rianda 2D Materials, Vol. 1, Issue 1 https://doi.org/10.1088/2053-1583/1/1/011002	journal	April 2014
Defect engineering of two-dimensional transition metal dichalcogenides Lin, Zhong; Carvalho, Bruno R.; Kahn, Ethan 2D Materials, Vol. 3, Issue 2 https://doi.org/10.1088/2053-1583/3/2/022002	journal	April 2016
Tuning of photodetection properties of V _0.5 Sn _0.5 Se ₂ ternary alloy Zankat, Chetan K.; Pataniya, Pratik; Solanki, G. K. Materials Research Express, Vol. 5, Issue 5 https://doi.org/10.1088/2053-1591/aac4ee	journal	May 2018
Probing combinations of acoustic phonons in MoS2 by intervalley double-resonance Raman scattering Gontijo, Rafael N.; Gadelha, Andreij; Silveira, Orlando J. Physical Review B, Vol. 103, Issue 4 https://doi.org/10.1103/PhysRevB.103.045411	journal	January 2021
Infrared Interlayer Exciton Emission in MoS 2 / WSe 2 Heterostructures Karni, Ouri; Barré, Elyse; Lau, Sze Cheung Physical Review Letters, Vol. 123, Issue 24 https://doi.org/10.1103/PhysRevLett.123.247402	journal	December 2019
Generalized Gradient Approximation Made Simple Perdew, John P.; Burke, Kieron; Ernzerhof, Matthias Physical Review Letters, Vol. 77, Issue 18, p. 3865-3868 https://doi.org/10.1103/PhysRevLett.77.3865	journal	October 1996
Humidity Sensing Properties of Coexfoliated Heterogeneous WS ₂ /WSe ₂ Nanohybrids Jha, Ravindra Kumar; Guha, Prasanta Kumar IEEE Transactions on Nanotechnology, Vol. 17, Issue 3 https://doi.org/10.1109/TNANO.2018.2827056	journal	May 2018
Tungsten disulfide (WS_2) based all-fiber-optic humidity sensor Luo, Yunhan; Chen, Chaoying; Xia, Kai Optics Express, Vol. 24, Issue 8 https://doi.org/10.1364/OE.24.008956	journal	January 2016

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Related Subjects

2D- WSe2
Chemical vapor deposition (CVD)
Defects in solids
Density functional theory (DFT)
Electrical properties
Humidity
Humidity sensor
Impedance humidity sensor
Molecules
Response and recovery times
Sensitivity
Sensors

An Impedance Humidity Sensor Based on CVD Grown WSe2 2D Films

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References (34)

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An Impedance Humidity Sensor Based on CVD Grown WSe₂ 2D Films