ZrO{sub 2}-ZnO composite thin films for humidity sensing

Journal Article · Mon May 23 04:00:00 EDT 2016 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4947910· OSTI ID:22608684

Sivacoumar, R.; Alex, Z. C. ^[1]; Meher, S. R.; Balakrishnan, L. ^[2]

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1. MEMS and Sensor Division, School of Electronics Engineering, VIT University, Vellore, 632014 (India)
2. Materials Physics Division, School of Advanced Science, VIT University, Vellore, 632014 (India)

ZrO{sub 2}-ZnO composite thin films were grown by reactive DC magnetron sputtering. X-ray diffraction studies reveal the composite nature of the films with separate ZnO and ZrO{sub 2} phase. Scanning electron microscopy studies confirm the nanocrystalline structure of the films. The films were studied for their impedometric relative humidity (RH) sensing characteristics. The complex impedance plot was fitted with a standard equivalent circuit consisting of an inter-granular resistance and a capacitance in parallel. The DC resistance was found to be decreasing with increase in RH.

• OSTI ID: 22608684
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1731; ISSN 0094-243X; ISSN APCPCS
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CAPACITANCE
CRYSTALS
EQUIVALENT CIRCUITS
HUMIDITY
IMPEDANCE
MAGNETRONS
NANOSTRUCTURES
SCANNING ELECTRON MICROSCOPY
SPUTTERING
THIN FILMS
X-RAY DIFFRACTION
ZINC OXIDES
ZIRCONIUM OXIDES