Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope

Nazaretski, Evgeny; Kim, Jungdae; Yan, H.; Lauer, K.; Eom, D.; Shu, D.; Maser, J.; Pešić, Z.; Wagner, U.; Rau, C.; Chu, Y. S.

doi:10.1063/1.4774387

Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope

Journal Article · Fri Mar 01 00:00:00 EST 2013 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4774387· OSTI ID:2564161

^[1]; Kim, Jungdae ^[2]; Yan, H. ^[1]; Lauer, K. ^[1]; Eom, D. ^[3]; Shu, D. ^[4]; Maser, J. ^[4]; Pešić, Z. ^[5]; Wagner, U. ^[5]; Rau, C. ^[5]; Chu, Y. S. ^[1]

Brookhaven National Laboratory (BNL), Upton, NY (United States)
Brookhaven National Laboratory (BNL), Upton, NY (United States); Univ. of Ulsan (Korea, Republic of)
Brookhaven National Laboratory (BNL), Upton, NY (United States); Korea Research Institute of Standards and Science, Daejeon (Korea, Republic of)
Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Science and Technology Facilities Council (STFC), Oxford (United Kingdom). Diamond Light Source, Ltd.

Synchrotron based x-ray microscopy established itself as a prominent tool for noninvasive investigations in many areas of science and technology. Many facilities around the world routinely achieve sub-micrometer resolution with a few instruments capable of imaging with the spatial resolution better than 100 nm. With an ongoing effort to push the 2D/3D resolution down to 10 nm in the hard x-ray regime both fabrication of the nano-focusing optics and stability of a microscope become extremely challenging. In this work we present our approach to overcome technical challenges on the path towards high spatial resolution hard x-ray microscopy and demonstrate the performance of a scanning fluorescence microscope equipped with the multilayer Laue lenses focusing optics.

View Accepted Manuscript (DOE)

Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities (SUF)

Grant/Contract Number:: AC02-06CH11357; AC02-98CH10886; SC0012704

OSTI ID:: 2564161

Alternate ID(s):: OSTI ID: 1091768

Report Number(s):: BNL--228137-2025-JAAM

Journal Information:: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 3 Vol. 84; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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