Epitaxial growth of oriented CoO films by radio-frequency sputtering deposition

Hwang, In-Hui; Stan, Liliana; Sun, Cheng-Jun; Han, Sang-Wook

doi:10.1016/j.vacuum.2023.112585

Epitaxial growth of oriented CoO films by radio-frequency sputtering deposition

Journal Article · Mon Sep 04 00:00:00 EDT 2023 · Vacuum

DOI:https://doi.org/10.1016/j.vacuum.2023.112585· OSTI ID:2511249

Hwang, In-Hui ^[1]; ^[2]; Sun, Cheng-Jun ^[1]; ^[3]

Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
Argonne National Laboratory (ANL), Argonne, IL (United States). Center for Nanoscale Materials (CNM)
Jeonbuk National University, Jeonju (Korea, Republic of)

Rock-salt CoO is a p-type semiconductor and its Neel temperature is close to room temperature. CoO-based compounds are known as promising systems for renewable energy harvest with high efficiency. CoO with catalytic and exchange bias properties can be widely used for industrial applications. In this paper, we report high-quality stable CoO(111) and (100) films epitaxially grown on c-cut (0001) and r-cut ($$10\bar1$$2) alpha-Al₂O₃ substrates, respectively, using radio-frequency sputtering deposition. X-ray diffraction (XRD) measurements revealed that the CoO films had a rock-salt structure (Fm3m) with lattice constants of 4.2477 Å and 4.2617 Å for film grown on (0001) and ($$10\bar1$$2) α-Al₂O₃ substrates, respectively. CoO films with the best crystal quality were grown at a substrate temperature of similar to ~700°C. XRD measurements of CoO(111) films indicated a lack of structural residual strain, whereas CoO(100) films had substantial amounts of structural strain. X-ray reflectivity (XRR) and transmission electron microscopy measurements showed neither oxygen vacancy nor defects in both CoO(111) and (100) films. Further, XRR revealed that the mean electron density of the CoO films was nearly identical to a pure CoO and that the films were considerably stable under the atmosphere.

View Accepted Manuscript (DOE)

Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States). Center for Nanoscale Materials (CNM); Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); National Research Foundation of Korea (NRF)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 2511249

Journal Information:: Vacuum, Journal Name: Vacuum Vol. 217; ISSN 0042-207X

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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