A versatile high-speed x-ray microscope for sub-10&nbsp;nm imaging

Xu, Weihe; Xu, Wei; Gao, Zirui; Gavrilov, Dmitri; Yan, Hanfei; Xu, Huijuan; Bouet, Nathalie; Zhou, Juan; Smith, Randy; Ma, Jun; Huang, Xiaojing; Chu, Yong S.; Nazaretski, Evgeny

doi:10.1063/5.0225904

A versatile high-speed x-ray microscope for sub-10 nm imaging

Journal Article · Fri Nov 15 00:00:00 EST 2024 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/5.0225904· OSTI ID:2475064

^[1]; ; Gao, Zirui; ; ; Xu, Huijuan; ; Zhou, Juan; ; ; ; ;

Brookhaven National Laboratory, National Synchrotron Light Source II

We have developed a next-generation scanning x-ray microscope RASMI (RApid Scanning Microscopy Instrument) for high-throughput tomographic imaging. RASMI is installed at the hard x-ray nanoprobe beamline at NSLS-II and is capable of manipulating 1D multilayer Laue lenses (MLLs) and 2D optics (both zone plates and monolithically assembled 2D MLLs). The sample scanning stage utilizes line-focusing interferometry as an encoder while performing fly-scanning data acquisition. The system can be configured for both position- and time-triggering modes during fly-scanning. The microscope demonstrated a detector-limited data acquisition rate of 1.25 kHz during ptychography measurements. The initial x-ray results yielded a sample-limited resolution of ∼6 nm in 2D. RASMI can be adopted for in-vacuum applications and is a foundation for the next-generation scanning microscopy systems to be developed and commissioned at NSLS-II.

View Accepted Manuscript (DOE)

Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities (SUF)

Grant/Contract Number:: SC0012704

OSTI ID:: 2475064

Alternate ID(s):: OSTI ID: 2478425

Report Number(s):: BNL--226364-2024-JAAM

Journal Information:: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 11 Vol. 95; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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36 MATERIALS SCIENCE
Data acquisition
Hard X-rays
Laser interferometry
Nanophotonics
Precision measurements
Ptychography
Scanning microscopy
X-ray imaging

A versatile high-speed x-ray microscope for sub-10 nm imaging

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