Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

Nakamura, Nathan; Szypryt, Paul; Dagel, Amber L.; Alpert, Bradley K.; Bennett, Douglas A.; Doriese, William Bertrand; Durkin, Malcolm; Fowler, Joseph W.; Fox, Dylan T.; Gard, Johnathon D.; Goodner, Ryan N.; Harris, James Zachariah; Hilton, Gene C.; Jimenez, Edward S.; Kernen, Burke L.; Larson, Kurt W.; Levine, Zachary H.; McArthur, Daniel; Morgan, Kelsey M.; O’Neil, Galen C.; Ortiz, Nathan J.; Pappas, Christine G.; Reintsema, Carl D.; Schmidt, Daniel R.; Schultz, Peter A.; Thompson, Kyle R.; Ullom, Joel N.; Vale, Leila; Vaughan, Courtenay T.; Walker, Christopher; Weber, Joel C.; Wheeler, Jason W.; Swetz, Daniel S.

doi:10.3390/s24092890

Nanoscale Three-Dimensional Imaging of Integrated Circuits Using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

Journal Article · Tue Apr 30 04:00:00 EDT 2024 · Sensors

DOI:https://doi.org/10.3390/s24092890· OSTI ID:2469889

^[1]; ^[1]; ^[2]; Alpert, Bradley K. ^[3]; Bennett, Douglas A. ^[3]; ^[3]; Durkin, Malcolm ^[1]; ^[1]; Fox, Dylan T. ^[2]; Gard, Johnathon D. ^[1]; Goodner, Ryan N. ^[2]; Harris, James Zachariah ^[2]; Hilton, Gene C. ^[3]; Jimenez, Edward S. ^[2]; Kernen, Burke L. ^[2]; Larson, Kurt W. ^[2]; ^[4]; McArthur, Daniel ^[2]; Morgan, Kelsey M. ^[1]; ^[3] more »

National Institute of Standards and Technology (NIST), Boulder, CO (United States); Univ. of Colorado, Boulder, CO (United States)
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
National Institute of Standards and Technology (NIST), Boulder, CO (United States)
National Institute of Standards and Technology (NIST), Gaithersburg, MD (United States)

X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but it is difficult to implement due to the competing requirements of X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while addressing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot on a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with a high signal-to-noise ratio. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enables nanoscale, element-specific X-ray imaging in a compact footprint. The proof of concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in six layers of a Cu-SiO₂ integrated circuit, and a path toward finer resolution and enhanced imaging capabilities is discussed.

View Accepted Manuscript (DOE)

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA); Intelligence Advanced Research Projects Activity (IARPA); US Department of Commerce

Grant/Contract Number:: NA0003525

OSTI ID:: 2469889

Journal Information:: Sensors, Journal Name: Sensors Journal Issue: 9 Vol. 24; ISSN 1424-8220

Publisher:: MDPI AGCopyright Statement

Country of Publication:: United States

Language:: English

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