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U.S. Department of Energy
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Towards Deterministic Defect Center Fabrication Using Sandia’s Focused Ion Implantation Capabilities

Conference ·
DOI:https://doi.org/10.2172/2463062· OSTI ID:2463062
 [1]
  1. Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
NA0003525
OSTI ID:
2463062
Report Number(s):
SAND2023-08232C
Country of Publication:
United States
Language:
English