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Towards Deterministic Defect Center Fabrication Using Sandia’s Focused Ion Implantation Capabilities

Conference ·
DOI:https://doi.org/10.2172/2430914· OSTI ID:2430914
 [1]
  1. Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
NA0003525
OSTI ID:
2430914
Report Number(s):
SAND2023-05154C
Country of Publication:
United States
Language:
English