Tuning Surface Adhesion Using Grayscale Electron-beam Lithography

Pradhan, Arushi; Thimons, Luke A.; Lavrik, Nickolay; Kravchenko, Ivan I.; Jacobs, Tevis D. B.

doi:10.1021/acs.langmuir.4c00669

Tuning Surface Adhesion Using Grayscale Electron-beam Lithography

Journal Article · Mon Jul 01 04:00:00 EDT 2024 · Langmuir

DOI:https://doi.org/10.1021/acs.langmuir.4c00669· OSTI ID:2406775

^[1]; ^[1]; Lavrik, Nickolay ^[2]; ^[2]; ^[1]

Univ. of Pittsburgh, PA (United States)
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Surface texturing of manufactured products tailors their properties, such as friction, adhesion, biocompatibility, or fluid interactions. However, advancements in this area are largely the result of trial-and-effort testing and generally lack a science-guided framework for determining the surface topography that will optimize performance. The present investigation explores grayscale electron-beam lithography as a means to create multiscale surface patterns to control surface performance. Here, we created and characterized a set of surface textures on a silicon wafer; the textures were superpositions of sine waves of varying wavelengths and amplitudes. First, the multiscale topography of the patterned surface was characterized, using profilometry and atomic force microscopy, to understand its fidelity to the designed-in pattern. The results of this analysis demonstrated how grayscale lithography accurately controlled the lateral size of features but was less precise on the vertical height of the surface, and also introduced inherent roughness below the scale of patterning. Second, a micromechanical tester was used to characterize the adhesion of the surfaces with large-scale polished silicon spheres. The results showed that adhesion could be tailored, with significant contribution from all of the designed-in length scales of topography. The strength of adhesion did not correlate with conventional roughness parameters but could be accurately modeled using simple numerical integration. Taken together, this investigation demonstrates the promise and challenges of grayscale e-beam lithography with multiscale patterns as a method for the tailoring of surface performance.

View Accepted Manuscript (DOE)

Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities (SUF); National Science Foundation (NSF)

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 2406775

Journal Information:: Langmuir, Journal Name: Langmuir Journal Issue: 28 Vol. 40; ISSN 0743-7463

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

References (51)

Nanoparticle and Biomolecule Surface Modification Synergistically Increases Neural Electrode Recording Yield and Minimizes Inflammatory Host Response Woeppel, Kevin M.; Cui, Xinyan Tracy Advanced Healthcare Materials, Vol. 10, Issue 16 https://doi.org/10.1002/adhm.202002150	journal	June 2021
Adhesion between Nanoscale Rough Surfaces Rabinovich, Yakov I.; Adler, Joshua J.; Ata, Ali Journal of Colloid and Interface Science, Vol. 232, Issue 1 https://doi.org/10.1006/jcis.2000.7167	journal	December 2000
Adhesion between Nanoscale Rough Surfaces Rabinovich, Yakov I.; Adler, Joshua J.; Ata, Ali Journal of Colloid and Interface Science, Vol. 232, Issue 1 https://doi.org/10.1006/jcis.2000.7168	journal	December 2000
Meeting the Contact-Mechanics Challenge Müser, Martin H.; Dapp, Wolf B.; Bugnicourt, Romain Tribology Letters, Vol. 65, Issue 4 https://doi.org/10.1007/s11249-017-0900-2	journal	August 2017
Contact and Deformation of Randomly Rough Surfaces with Varying Root-Mean-Square Gradient McGhee, Alexander J.; Pitenis, Angela A.; Bennett, Alexander I. Tribology Letters, Vol. 65, Issue 4 https://doi.org/10.1007/s11249-017-0942-5	journal	November 2017
Hard-material Adhesion: Which Scales of Roughness Matter? Thimons, L. A.; Gujrati, A.; Sanner, A. Experimental Mechanics, Vol. 61, Issue 7 https://doi.org/10.1007/s11340-021-00733-6	journal	July 2021
Adhesion of spheres: The JKR-DMT transition using a dugdale model Maugis, Daniel Journal of Colloid and Interface Science, Vol. 150, Issue 1 https://doi.org/10.1016/0021-9797(92)90285-T	journal	April 1992
The elastic contact of a rough surface Bush, A. W.; Gibson, R. D.; Thomas, T. R. Wear, Vol. 35, Issue 1 https://doi.org/10.1016/0043-1648(75)90145-3	journal	November 1975
Comparison of models for the contact of rough surfaces McCool, John I. Wear, Vol. 107, Issue 1 https://doi.org/10.1016/0043-1648(86)90045-1	journal	January 1986
The hardness of silicon and germanium Vandeperre, L. J.; Giuliani, F.; Lloyd, S. J. Acta Materialia, Vol. 55, Issue 18 https://doi.org/10.1016/j.actamat.2007.07.036	journal	October 2007
Adhesive behavior of micro/nano-textured surfaces Zhang, Yuyan; Wang, Xiaoli; Li, Hanqing Applied Surface Science, Vol. 329 https://doi.org/10.1016/j.apsusc.2014.12.040	journal	February 2015
Effects of hierarchical structures and insulating liquid media on adhesion Yang, Weixu; Wang, Xiaoli; Li, Hanqing Applied Surface Science, Vol. 423 https://doi.org/10.1016/j.apsusc.2017.06.181	journal	November 2017
Manufacturing of multiscale structured surfaces Brinksmeier, Ekkard; Karpuschewski, Bernhard; Yan, Jiwang CIRP Annals, Vol. 69, Issue 2 https://doi.org/10.1016/j.cirp.2020.06.001	journal	January 2020
Measurement of the strength and range of adhesion using atomic force microscopy Jiang, Yijie; Turner, Kevin T. Extreme Mechanics Letters, Vol. 9 https://doi.org/10.1016/j.eml.2016.05.013	journal	December 2016
Adhesion forces between a parabolic-shaped AFM tip scanning a grooved gold surface: Comparison of a model and an experiment Lai, Tianmao; Meng, Yonggang; Huang, Ping International Journal of Adhesion and Adhesives, Vol. 86 https://doi.org/10.1016/j.ijadhadh.2018.09.002	journal	November 2018
Nanoindentation of polymeric thin films with an interfacial force microscope Wang, M. Journal of the Mechanics and Physics of Solids, Vol. 52, Issue 10 https://doi.org/10.1016/j.jmps.2004.03.005	journal	October 2004
Controlling resist thickness and etch depth for fabrication of 3D structures in electron-beam grayscale lithography Kim, J.; Joy, D. C.; Lee, S. -Y. Microelectronic Engineering, Vol. 84, Issue 12 https://doi.org/10.1016/j.mee.2007.02.015	journal	December 2007
Fabrication of 3D patterns with vertical and sloped sidewalls by grayscale electron-beam lithography and thermal annealing Schleunitz, Arne; Schift, Helmut Microelectronic Engineering, Vol. 88, Issue 8 https://doi.org/10.1016/j.mee.2010.12.046	journal	August 2011
Fabrication of three-dimensional microstructure using maskless gray-scale lithography Totsu, Kentaro; Fujishiro, Kenta; Tanaka, Shuji Sensors and Actuators A: Physical, Vol. 130-131 https://doi.org/10.1016/j.sna.2005.12.008	journal	August 2006
Effects of –H and –OH Termination on Adhesion of Si–Si Contacts Examined Using Molecular Dynamics and Density Functional Theory Schall, J. David; Morrow, Brian H.; Carpick, Robert W. Langmuir, Vol. 40, Issue 9 https://doi.org/10.1021/acs.langmuir.3c02870	journal	February 2024
Large-Scale Metasurfaces Based on Grayscale Nanosphere Lithography Zheng, Hanyu; Zhou, You; Ugwu, Chibuzor Fabian ACS Photonics, Vol. 8, Issue 6 https://doi.org/10.1021/acsphotonics.1c00424	journal	June 2021
Reducing Adhesion Force by Means of Atomic Layer Deposition of ZnO Films with Nanoscale Surface Roughness Chai, Zhimin; Liu, Yuhong; Lu, Xinchun ACS Applied Materials & Interfaces, Vol. 6, Issue 5 https://doi.org/10.1021/am4053333	journal	February 2014
Controlling Adhesion Force by Means of Nanoscale Surface Roughness Ramakrishna, Shivaprakash N.; Clasohm, Lucy Y.; Rao, Akshata Langmuir, Vol. 27, Issue 16 https://doi.org/10.1021/la201727t	journal	July 2011
Study of Adhesion and Friction Properties on a Nanoparticle Gradient Surface: Transition from JKR to DMT Contact Mechanics Ramakrishna, Shivaprakash N.; Nalam, Prathima C.; Clasohm, Lucy Y. Langmuir, Vol. 29, Issue 1 https://doi.org/10.1021/la304226v	journal	December 2012
All-Nanoparticle Thin-Film Coatings Lee, Daeyeon; Rubner, Michael F.; Cohen, Robert E. Nano Letters, Vol. 6, Issue 10 https://doi.org/10.1021/nl061776m	journal	October 2006
The role of van der Waals forces in adhesion of micromachined surfaces DelRio, Frank W.; de Boer, Maarten P.; Knapp, James A. Nature Materials, Vol. 4, Issue 8 https://doi.org/10.1038/nmat1431	journal	July 2005
Chemical vapour deposition Sun, Luzhao; Yuan, Guowen; Gao, Libo Nature Reviews Methods Primers, Vol. 1, Issue 1 https://doi.org/10.1038/s43586-020-00005-y	journal	January 2021
The effect of surface roughness on the adhesion of elastic solids Persson, B. N. J.; Tosatti, E. The Journal of Chemical Physics, Vol. 115, Issue 12 https://doi.org/10.1063/1.1398300	journal	September 2001
Reducing the effects of adhesion and friction in microelectromechanical systems (MEMSs) through surface roughening: Comparison between theory and experiments Tayebi, Noureddine; Polycarpou, Andreas A. Journal of Applied Physics, Vol. 98, Issue 7 https://doi.org/10.1063/1.2058178	journal	October 2005
The autocorrelation function for island areas on self-affine surfaces Ramisetti, Srinivasa B.; Campañá, Carlos; Anciaux, Guillaume Journal of Physics: Condensed Matter, Vol. 23, Issue 21 https://doi.org/10.1088/0953-8984/23/21/215004	journal	May 2011
Quantitative characterization of surface topography using spectral analysis Jacobs, Tevis D. B.; Junge, Till; Pastewka, Lars Surface Topography: Metrology and Properties, Vol. 5, Issue 1 https://doi.org/10.1088/2051-672X/aa51f8	journal	January 2017
Characterization of small-scale surface topography using transmission electron microscopy Khanal, Subarna R.; Gujrati, Abhijeet; Vishnubhotla, Sai Bharadwaj Surface Topography: Metrology and Properties, Vol. 6, Issue 4 https://doi.org/10.1088/2051-672X/aae5b3	journal	October 2018
Comprehensive topography characterization of polycrystalline diamond coatings Gujrati, Abhijeet; Sanner, Antoine; Khanal, Subarna R. Surface Topography: Metrology and Properties, Vol. 9, Issue 1 https://doi.org/10.1088/2051-672X/abe71f	journal	March 2021
Contact.engineering—Create, analyze and publish digital surface twins from topography measurements across many scales Röttger, Michael C.; Sanner, Antoine; Thimons, Luke A. Surface Topography: Metrology and Properties, Vol. 10, Issue 3 https://doi.org/10.1088/2051-672X/ac860a	journal	September 2022
Physical Chemistry for the Life Sciences Atkins, Peter; Ratcliffe, George; Wormald, Mark https://doi.org/10.1093/hesc/9780198830108.001.0001	book	March 2023
Adhesion of elastic spheres Greenwood, J. A. Proceedings of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences, Vol. 453, Issue 1961 https://doi.org/10.1098/rspa.1997.0070	journal	June 1997
State of the Art in Laser Surface Texturing Etsion, Izhak Journal of Tribology, Vol. 127, Issue 1 https://doi.org/10.1115/1.1828070	journal	January 2005
Random Process Model of Rough Surfaces Nayak, P. Ranganath Journal of Lubrication Technology, Vol. 93, Issue 3 https://doi.org/10.1115/1.3451608	journal	July 1971
Process optimization and proximity effect correction for gray scale e-beam lithography Murali, Raghunath; Brown, Devin K.; Martin, Kevin P. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 6 https://doi.org/10.1116/1.2357962	journal	January 2006
Design, simulation, and fabrication of three-dimensional microsystem components using grayscale photolithography Smith, Melissa A.; Berry, Shaun; Parameswaran, Lalitha Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 18, Issue 04 https://doi.org/10.1117/1.JMM.18.4.043507	journal	November 2019
Microlens array fabricated by a low-cost grayscale lithography maskless system Aristizabal, Sergio Lopera; Cirino, Giuseppe Antonio; Montagnoli, Arlindo Neto Optical Engineering, Vol. 52, Issue 12 https://doi.org/10.1117/1.OE.52.12.125101	journal	December 2013
Adhesion between an elastic body and a randomly rough hard surface Persson, B. N. J. The European Physical Journal E, Vol. 8, Issue 4 https://doi.org/10.1140/epje/i2002-10025-1	journal	July 2002
Accounting for the JKR–DMT transition in adhesion and friction measurements with atomic force microscopy Grierson, D. S.; Flater, E. E.; Carpick, R. W. Journal of Adhesion Science and Technology, Vol. 19, Issue 3-5 https://doi.org/10.1163/1568561054352685	journal	January 2005
On the contact and adhesion of rough surfaces Maugis, D. Journal of Adhesion Science and Technology, Vol. 10, Issue 2 https://doi.org/10.1163/156856196X00832	journal	January 1996
Characterization of Poly(methyl methacrylate) Prepared by Plasma-Initiated Polymerization Kashiwagi, Yasuhiro; Einaga, Yoshiyuki; Fujita, Hiroshi Polymer Journal, Vol. 12, Issue 4 https://doi.org/10.1295/polymj.12.271	journal	April 1980
Single-digit 6-nm multilevel patterns by electron beam grayscale lithography Kirchner, Robert; Guzenko, Vitaliy A.; Schift, Helmut Advanced Optical Technologies, Vol. 8, Issue 3-4 https://doi.org/10.1515/aot-2019-0016	journal	April 2019
Tribological characteristics of polycrystalline diamond films produced by chemical vapor deposition Kohzaki, M.; Higuchi, K.; Noda, S. Journal of Materials Research, Vol. 7, Issue 7 https://doi.org/10.1557/JMR.1992.1769	journal	July 1992
Surface topography as a material parameter Jacobs, Tevis D. B.; Pastewka, Lars MRS Bulletin, Vol. 47, Issue 12 https://doi.org/10.1557/s43577-022-00465-5	journal	December 2022
Optimizing the surface of manufactured components for friction, adhesion, and convective heat transfer Costa, Henara L.; Profito, Francisco J.; Zhang, Xuan MRS Bulletin, Vol. 47, Issue 12 https://doi.org/10.1557/s43577-022-00467-3	journal	December 2022
Review of Growth Defects in Thin Films Prepared by PVD Techniques Panjan, Peter; Drnovšek, Aljaž; Gselman, Peter Coatings, Vol. 10, Issue 5 https://doi.org/10.3390/coatings10050447	journal	May 2020
Fabrication of Micro-Optics Elements with Arbitrary Surface Profiles Based on One-Step Maskless Grayscale Lithography Deng, Qinyuan; Yang, Yong; Gao, Hongtao Micromachines, Vol. 8, Issue 10 https://doi.org/10.3390/mi8100314	journal	October 2017

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