Boron carbide films with reduced nodular defect density deposited by full-face erosion radio-frequency magnetron sputtering

Taylor, G. V.; Bayu Aji, L. B.; Shin, S. J.; Bae, J. H.; Engwall, A. M.; Kucheyev, S. O.

doi:10.1116/6.0003571

Boron carbide films with reduced nodular defect density deposited by full-face erosion radio-frequency magnetron sputtering

Journal Article · Thu May 30 00:00:00 EDT 2024 · Journal of Vacuum Science and Technology A

DOI:https://doi.org/10.1116/6.0003571· OSTI ID:2406146

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Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
General Atomics, San Diego, CA (United States)

Boron carbide coatings deposited by sputtering with conventional planar magnetrons exhibit nodular growth defects. Here, we demonstrate that the density of nodular defects in B₄C films can be greatly reduced by using a full-face-erosion magnetron source that achieves a more uniform target erosion by sweeping the confining magnetic field over the target surface. Here, we systematically study properties of B₄C films deposited on substrates with different tilt angles and demonstrate deposition of ultrathick films with compressive residual stress below 200MPa.

View Accepted Manuscript (DOE)

Research Organization:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA); USDOE Laboratory Directed Research and Development (LDRD) Program; General Atomics

Grant/Contract Number:: AC52-07NA27344; 89233119CNA000063

OSTI ID:: 2406146

Report Number(s):: LLNL-JRNL-860475; 1091687

Journal Information:: Journal of Vacuum Science and Technology A, Journal Name: Journal of Vacuum Science and Technology A Journal Issue: 4 Vol. 42; ISSN 0734-2101

Publisher:: American Vacuum Society / AIPCopyright Statement

Country of Publication:: United States

Language:: English

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36 MATERIALS SCIENCE
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Boron carbide films with reduced nodular defect density deposited by full-face erosion radio-frequency magnetron sputtering

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