A study of magnetron sputtered CN{sub x} films
Conference
·
OSTI ID:230173
- Univ. of Science and Technology, Beijing (China); and others
C{sub 3}N{sub 4} was predicted to have a crystal structure of {Beta}Si{sub 3}N{sub 4}, and a hardness superior to that of diamond, and hence become a target attracting scientists all over the world. In the present paper CN{sub x} films were successfully prepared by DC magnetron sputtering of pure graphite target in pure nitrogen atmosphere. N/C ratio and the nature of the chemical binding of C-N atoms were analyzed by SEM, TEM, XPS spectroscopy, IR spectroscopy and MPM and was found to be strongly process related.
- OSTI ID:
- 230173
- Report Number(s):
- CONF-950840--
- Country of Publication:
- United States
- Language:
- English
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