High sensitivity and wide temperature tolerance hydrogen gas sensors utilizing PECVD diamond technology
Conference
·
OSTI ID:230020
- Vanderbilt Univ., Nashville, TN (United States); and others
A novel diamond-based hydrogen sensor using Pd/i-diamond/p-diamond metal-insulator-semiconductor structure has been developed. Hydrogen-sensing behaviors of the device have been analyzed as a function of hydrogen partial pressure and temperature by using current-voltage (I-V) and capacitance-voltage-frequency (C-V-F) methods. The effects of the hydrogen adsorption on the device parameters are investigated. The hydrogen sensitivity is high, reproducible, and repeatable over a wide temperature range including room temperature. The use of the diamond film technology opens a door for the development of wide temperature tolerance microelectronic gas sensors.
- OSTI ID:
- 230020
- Report Number(s):
- CONF-950840--
- Country of Publication:
- United States
- Language:
- English
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