Spectral characterisation of aperiodic normal-incidence Sb/B{sub 4}C multilayer mirrors for the λ < 124 Å range

Journal Article · Thu Mar 01 04:00:00 EST 2018 · Quantum Electronics (Woodbury, N.Y.)

DOI:https://doi.org/10.1070/QEL16574· OSTI ID:23000243

Vishnyakov, E. A.; Kopylets, I. A.; Kondratenko, V. V.; Kolesnikov, A. O.; Pirozhkov, A. S.; Ragozin, E. N.; Shatokhin, A. N.

Three broadband aperiodic Sb/B{sub 4}C multilayer mirrors were synthesised for the purposes of soft X-ray optics and spectroscopy in the wavelength range beyond the L-edge of Si (λ < 124 Å), and their reflection spectra were measured. The multilayer structures were optimised for maximum uniform reflectivity in the ranges 100 – 120 Å, 95 – 105 Å and 90 – 100 Å. The reflection spectra were recorded using a laboratory laser-plasma radiation source and an electronic detector with a 2D spatial resolution (a CCD matrix with 13 × 13 μm sized pixels). The experimental spectra are compared with theoretical calculations. The effect of lower antimony and B{sub 4}C layer densities on the reflection spectra is discussed. (invited paper)

• OSTI ID: 23000243
• Journal Information: Quantum Electronics (Woodbury, N.Y.), Journal Name: Quantum Electronics (Woodbury, N.Y.) Journal Issue: 3 Vol. 48; ISSN 1063-7818; ISSN QUELEZ
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ANTIMONY
BORON CARBIDES
DENSITY
LASERS
OPTICS
PLASMA
REFLECTION
REFLECTIVITY
SOFT X RADIATION
SPECTRA
SPECTROSCOPY
WAVELENGTHS