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High Quality Graphene Grown by Sublimation on 4H-SiC (0001)

Journal Article · · Semiconductors
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  1. Saint Petersburg State University (Russian Federation)
  2. ITMO University (Russian Federation)
  3. Ioffe Institute (Russian Federation)
  4. Technische Universität Ilmenau (Germany)

The structural and electronic characteristics of epitaxial graphene films grown by thermal decomposition of the Si face of a semi-insulating 4H-SiC substrate in an argon environment have been studied by a large set of analytical techniques. It is shown that the results of a complex study make it possible to optimize the growth parameters and develop a reliable technology for the growth of high-quality single-layer graphene films. The charge-carrier concentration in the graphene layer was within 7 × 10{sup 11}–1 × 10{sup 12} cm{sup –2}, and the maximum mobility of electrons at room temperature approached 6000 cm{sup 2}/(V s).

OSTI ID:
22945144
Journal Information:
Semiconductors, Journal Name: Semiconductors Journal Issue: 14 Vol. 52; ISSN SMICES; ISSN 1063-7826
Country of Publication:
United States
Language:
English