Amorphous Films of Ternary Zinc and Tin Oxides for Transparent Electronics
Journal Article
·
· Technical Physics Letters
- Voronezh State Technical University (Russian Federation)
- Anadolu University (Turkey)
Amorphous films of two varieties of zinc stannate (ZnSnO{sub 3} and Zn{sub 2}SnO{sub 4}) have been considered that were fabricated by radio-frequency sputtering of ceramic compound targets containing ZnO and SnO{sub 2} in 1: 1 and 2: 1 ratios. The elemental and phase compositions of the films and their optical and electrical parameters were determined. The transparency of the films in the visible spectral range is on average 87%. Zinc stannate amorphous films have a high electrical conductivity in contrast to amorphous ZnO and SnO{sub 2}. This phenomenon, which makes it possible to use zinc stannate amorphous films in transparent and flexible electronics, is explained.
- OSTI ID:
- 22927932
- Journal Information:
- Technical Physics Letters, Journal Name: Technical Physics Letters Journal Issue: 11 Vol. 44; ISSN 1063-7850
- Country of Publication:
- United States
- Language:
- English
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